Low-pressure gas discharge modelling

Finite Volume Method for Streamer and Gas Dynamics Modelling in Air Discharges at Atmospheric Pressure

New insights into aging phenomena from plasma chemistry

While gas discharges under atmospheric pressure occur as filamentary discharges, most studies on plasma polymerization, or plasma Chemical Vapour Deposition (CVD), were carried out in low-pressure (low temperature, non-equilibrium) plasma. However, it is reasonable to assume that the fundamentals of plasma polymerization found by low-pressure discharge apply to the gas phase in the filamentary ...

EXPERIMENTAL INVESTIGATION OF THE POPULATION DENSITIES OF LOWEREXCITED STATES OF NEON

Many studies employing various methods have been carried out into the number densities of excited atoms in electrical discharges with inert gases [1,2,3], but the ranges of the discharge current and gas pressure is very limited in them all. In this work, the population densities of 3S, 3s' of neon have been investigated using the atomic absorption method. Since the discharge current and gas...

Spectroscopic Characterisation of an Atmospheric Pressure Glow Discharge*

Recently there has been considerable interest in atmospheric discharges operating in a glow discharge mode i.e. with a spatial and sheath structure similar to that of low pressure glow discharges [1,2,3]. Here spectroscopy has been used to characterise an atmospheric pressure glow discharge (APGD), operating with either dry air, argon or helium gas flowing through the inter-electrode space and ...

AlNXOY THIN FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING

AlNxOy thin films were produced by DC reactive magnetron sputtering, using an atmosphere of argon and a reactive gas mixture of nitrogen and oxygen, for a wide range of partial pressures of reactive gas. During the deposition, the discharge current was kept constant and the discharge parameters were monitored. The deposition rate, chemical composition, morphology, structure and electrical resis...